Semiconductor Industry

We provide a wide range of seal products for semiconductor manufacturing equipment and the devices incorporated into that equipment.

Our product lineup includes magnetic fluid seals, welded metal bellows, rotary joints, and high-performance O-rings, which we supply to semiconductor manufacturing equipment manufacturers and related equipment manufacturers around the world.

One of our major strengths is our ability to manufacture this diverse range of seal products entirely within the Group. Our Group is the only one in the world with this kind of integrated production capability. By fully leveraging this strength, we develop and propose proprietary hybrid seals that combine multiple sealing technologies, contributing to higher equipment performance and more compact designs while helping customers create greater added value.

Products

Semiconductor and Advanced Industries

To meet the demanding requirements of the semiconductor and advanced industries, including low particle generation, low friction, heat resistance, and plasma resistance, we develop and manufacture all of the base oils, magnetic particles, and surfactants used in our magnetic fluids within the Group. This enables excellent heat resistance and low outgassing characteristics while ensuring stable performance.

Our welded metal bellows draw on technologies and extensive experience developed in fields requiring high levels of reliability, including nuclear power, aerospace, and chemical plants, enabling us to provide high-quality, highly reliable products.

For rotary joints, we leverage our expertise as a leading manufacturer in the mechanical seal field to offer high-performance, highly reliable products. Our proprietary surface texturing technology also enables us to offer products that achieve both low torque and ultra-low leakage.

Our high-performance O-ring lineup includes the Clear Semiconductor-Grade FFKM O-Ring and the Semiconductor-Grade FKM O-Ring, both of which use filler-free specifications to ensure low particle generation while providing excellent heat resistance and plasma resistance.

Going forward, we will continue to leverage our integrated Group-wide development capabilities to provide products and technologies that meet advanced needs.